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Role of Si2N2O in the Passive Oxidation of Chemically-Vapor-Deposited Si3N4

✍ Scribed by Linus U. J. T. Ogbuji


Book ID
110825679
Publisher
John Wiley and Sons
Year
1992
Tongue
English
Weight
749 KB
Volume
75
Category
Article
ISSN
0002-7820

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