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Role of relative size of asperities and adhering particles on the adhesion force

✍ Scribed by Kumar, Aditya; Staedler, Thorsten; Jiang, Xin


Book ID
121359568
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
407 KB
Volume
409
Category
Article
ISSN
0021-9797

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The friction and pull-off forces were measured between atomic force microscope AFM probe and submicron-size asperity arrays on Ε½ . a silicon wafer in various relative humidities. First, a focused ion beam FIB was used to produce two-dimensional arrays in which asperities were arranged at uniform int