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Role of nitrogen atoms in ``ion-nitriding''

✍ Scribed by Tibbetts, Gary G.


Book ID
121398411
Publisher
American Institute of Physics
Year
1974
Tongue
English
Weight
319 KB
Volume
45
Category
Article
ISSN
0021-8979

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Nitrogen atoms in Arξ—ΈN2 flowing microwav
✍ A. Ricard; J. Deschamps; J.L. Godard; L. Falk; H. Michel πŸ“‚ Article πŸ“… 1991 πŸ› Elsevier Science 🌐 English βš– 471 KB

High nitrogen atom densities (10~5-10 " cm-3) have been produced in high pressure (20-760 Torr) Ar-N~ flowing post-discharges. Gas ionization is performed by 2.45 GHz surfatron and surfaguide exciters with 100-200 W transmitted power. Nitrogen atoms have been measured by NO titration and by the abso