✦ LIBER ✦
Role of local microchemistry and surface structure in electrical resistivity of 50 nm electroless films Ag–W–oxygen
✍ Scribed by E. Glickman; A. Inberg; V. Bogush; G. Aviram; R. Popovitz; N. Croitoru; Y. Shacham-Diamand
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 312 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
We studied electroless 50 nm films Ag (0.2-1.2 at.% W) which contain also some oxygen and were deposited onto SiO 2 /Si substrate. The films showed better corrosion resistance and hardness than pure Ag, but rather high electrical resistivity q which decayed fast after annealing at T P 100