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Role of interparticle forces during stress-induced agglomeration of CMP slurries

โœ Scribed by Feng-Chi Chang; Purushottam Kumar; Rohit Singh; Kannan Balasundaram; Jaeseok Lee; Jinhyung Lee; Rajiv K. Singh


Book ID
113550170
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
607 KB
Volume
389
Category
Article
ISSN
0927-7757

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