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Role of interface states and depletion layer in NO2 sensing mechanism of n-InP epitaxial layers

✍ Scribed by K. Wierzbowska; B. Adamowicz; B. Lauron; L. Bideux


Book ID
116886247
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
869 KB
Volume
181
Category
Article
ISSN
0924-4247

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This paper deals with the influence of technological process steps on electrical and metrological parameters of NO 2 gas sensors. The NO 2 gas sensors are based on thin n-InP epitaxial layers. The NO 2 gas action makes the resistance of the device, measured in parallel to the surface between ohmic c