NO2 gas sensing studies: Impact of geome
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L. Berry; J. Brunet; C. Varenne; L. Mazet; A. Pauly; K. Wierzbowska
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Article
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2007
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Elsevier Science
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English
⚖ 590 KB
This paper deals with the influence of technological process steps on electrical and metrological parameters of NO 2 gas sensors. The NO 2 gas sensors are based on thin n-InP epitaxial layers. The NO 2 gas action makes the resistance of the device, measured in parallel to the surface between ohmic c