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Role of hydrogen in the separation of a porous Si layer in a layer transfer process

✍ Scribed by Bilyalov, R. ;Solanki, C. S. ;Poortmans, J. ;Ulyashin, A. ;Job, R. ;Fahrner, W.

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
583 KB
Volume
197
Category
Article
ISSN
0031-8965

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