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Role of energetic atoms and ions in Ta films grown by different physical vapor deposition methods

✍ Scribed by Roy, R. A.

Book ID: 121708758
Publisher: AVS (American Vacuum Society)
Year: 1993
Tongue: English
Weight: 798 KB
Volume: 11
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.586523

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