Ripple Technique; a Novel Non-Contact Wafer Emissivity and Temperature Method for RTP

✍ Scribed by Schietinger, C.; Adams, B.; Yarling, C.

• Book ID: 118042104
• Publisher: Cambridge University Press
• Year: 1991
• Weight: 437 KB
• Volume: 224
• Category: Article
• ISSN: 0272-9172
• DOI: 10.1557/proc-224-23