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Ring Opening Metathesis Polymerization Derived Polymers as Photoresists: Making Use of Thiol-ene Chemistry

✍ Scribed by Archim Wolfberger; Barbara Rupp; Wolfgang Kern; Thomas Griesser; Christian Slugovc

Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 338 KB
Volume: 32
Category: Article
ISSN: 1022-1336
DOI: 10.1002/marc.201000698

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✦ Synopsis

Abstract

Ring opening metathesis polymerization derived poly(norbornene) films and aggregates were crosslinked via photo chemically induced thiol‐ene chemistry using a multifunctional thiol and the double bonds present in the polymer backbones. The presented method was illustrated by the description of a negative‐toned photoresist formulation based on above mentioned ingredients. magnified image

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