✦ LIBER ✦
RIE of sub-50 nm high aspect-ratio pillars, ridges, and trenches in silicon and silicon-germanium
✍ Scribed by P.B. Fischer; S.Y. Chou
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 351 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.