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RF response of high RF-Tc SNS Josephson microbridges suitable for integrated circuit applications

✍ Scribed by Ono, R.H.; Beall, J.A.; Cromar, M.W.; Harvey, T.E.; Johansson, M.E.; Reintsema, C.D.; Rudman, D.A.


Book ID
114534804
Publisher
IEEE
Year
1991
Tongue
English
Weight
148 KB
Volume
38
Category
Article
ISSN
0018-9383

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## Abstract Spiral inductors with various turn numbers fabricated with the use of leading‐edge 0.13‐μm mixed‐signal/RF CMOS technology with 193‐nm lithography and Cu/low‐k interconnect are described in this article. It is shown that quality (Q) factor decreased and increased with increasing tempera