✦ LIBER ✦
Rf plasma properties of flat electrodes with multi-input terminals
✍ Scribed by KK Hirakuri; N Mutsukura; Y Machi
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 457 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0042-207X
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