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RF PECVD Characteristics for the Growth of Carbon Nanotubes in a $\hbox{CH}_{4}$–$ \hbox{N}_{2}$ Mixed Gas
✍ Scribed by Yuji, Toshifumi; Sung, Youl-Moon
- Book ID
- 120618984
- Publisher
- IEEE
- Year
- 2007
- Tongue
- English
- Weight
- 572 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0093-3813
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