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RF magnetron sputtering deposition of bioactive Ca-P-based coatings on Ti-6Al-4V alloy

✍ Scribed by Xu, S.; Long, J.D.; Ostrikov, K.N.; Lu, J.H.; Diong, C.H.

Book ID
120278190
Publisher
IEEE
Year
2002
Tongue
English
Weight
180 KB
Volume
30
Category
Article
ISSN
0093-3813

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In previous studies, an RF magnetron sputter technique was developed for the production of thin calcium phosphate coating. Several deposition parameters were found to influence the growth rate and the stoichiometry of the coatings. For instance, deposition with additional oxygen pressure decreased t