✦ LIBER ✦
RF electric field penetration and power deposition into nonequilibrium planar-type inductively coupled plasmas
✍ Scribed by Ming, Mao; Shuai, Wang; Zhong-Ling, Dai; You-Nian, Wang
- Book ID
- 121497437
- Publisher
- Institute of Physics
- Year
- 2007
- Tongue
- English
- Weight
- 1019 KB
- Volume
- 16
- Category
- Article
- ISSN
- 1009-1963
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