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Rf driven multicusp ion source for pulsed or steady-state ion beam production

✍ Scribed by K.N. Leung; D.A. Bachman; P.R. Herz; D.S. McDonald

Book ID: 113283699
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 362 KB
Volume: 74
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(93)95063-b

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