Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist

✍ Scribed by Maren R. Kirchhoff; Jens Güttler; Andreas Waldschik; Marco Feldmann; Stephanus Büttgenbach

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 505 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.12.002