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Review of atomic MEMS: driving technologies and challenges

✍ Scribed by Haifeng Dong; Jiancheng Fang; Binquan Zhou; Jie Qin; Shuangai Wan


Book ID
106185950
Publisher
Springer-Verlag
Year
2010
Tongue
English
Weight
434 KB
Volume
16
Category
Article
ISSN
0946-7076

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