Review: dry etching of silicon oxide : Alfred J. van Roosmalen. Vacuum34 (3–4), 429 (1984)

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 120 KB
• Volume: 24
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(84)90130-6