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Resonating microbridge mass flow sensor

✍ Scribed by Siebe Bouwstra; Rob Legtenberg; Harrie A.C. Tilmans; Miko Elwenspoek

Book ID: 103957343
Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 586 KB
Volume: 21
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)85066-d

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