Resolution standard for scanning electron microscope comprising palladium spines on a metal substrate : C F Aliotta, M Anschel, assigned to International Business Machines Corp

• Book ID: 103492059
• Publisher: Elsevier Science
• Year: 1982
• Weight: 87 KB
• Volume: 13
• Category: Article
• ISSN: 0047-7206
• DOI: 10.1016/0047-7206(82)90127-3