✦ LIBER ✦
Resolution blur of latent acid image and acid generation efficiency of chemically amplified resists for electron beam lithography
✍ Scribed by Kozawa, Takahiro; Tagawa, Seiichi
- Book ID
- 118223587
- Publisher
- American Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 430 KB
- Volume
- 99
- Category
- Article
- ISSN
- 0021-8979
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