✦ LIBER ✦
Resists used in plasma processing : E. D. Roberts. Vacuum35(10–11), 479 (1985)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 121 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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