✦ LIBER ✦
Resistless patterning of sub-micron structures by evaporation through nanostencils
✍ Scribed by J. Brugger; J.W. Berenschot; S. Kuiper; W. Nijdam; B. Otter; M. Elwenspoek
- Book ID
- 108411112
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 916 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0167-9317
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