Resistivity of phosphorus-doped sputter-deposited polycrystalline silicon films : Edgardo Gabilli, Sergio Guerri, Guido Masetti and Maurizio Severi. Solid-St. Electron. 20, 925 (1977)

• Publisher: Elsevier Science
• Year: 1978
• Tongue: English
• Weight: 123 KB
• Volume: 17
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(78)91079-x