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Resistivity and piezoelectric measurements on oriented and unoriented thick PVF2 films

✍ Scribed by Anthony J. Bur

Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
179 KB
Volume
22
Category
Article
ISSN
0032-3861

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## Abstract __c__‐Axis oriented aluminum nitride (AlN) thin films are successfully prepared on amorphous polyimide films by radiofrequency magnetron reactive sputtering at room temperature. Structural analysis shows that the AlN films have a wurtzite structure and consist of __c__‐axis oriented col