Resistance adjustment with short-pulse Nd:YAG laser for RuO2 -based thick-film resistors buries in polyimide film

✍ Scribed by Gofuku, E.; Ohnawa, T.; Kohara, M.; Nunoshita, M.

• Book ID: 114560475
• Publisher: IEEE
• Year: 1993
• Tongue: English
• Weight: 637 KB
• Volume: 16
• Category: Article
• ISSN: 0148-6411
• DOI: 10.1109/33.241784