✦ LIBER ✦
Resist process issues related to the glass transition changes in chemically amplified resist films
✍ Scribed by I. Raptis; D. Niakoula; E. Tegou; V. Bellas; E. Gogolides; P. Argitis; K.G. Papadokostaki; A. Ioannidis
- Book ID
- 114155523
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 233 KB
- Volume
- 67-68
- Category
- Article
- ISSN
- 0167-9317
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