✦ LIBER ✦
Resist-less patterning on SiO2by combination of X-ray exposure and vapor HF etching
✍ Scribed by Harutaka Mekaru; Makoto Fujimaki; Koichi Awazu; Masaharu Takahashi
- Book ID
- 106185850
- Publisher
- Springer-Verlag
- Year
- 2009
- Tongue
- English
- Weight
- 732 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0946-7076
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