Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition

✍ Scribed by A.G. Gómez; A.A.C. Recco; N.B. Lima; L.G. Martinez; A.P. Tschiptschin; R.M. Souza

• Book ID: 108278644
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 258 KB
• Volume: 204
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2010.03.016