✦ LIBER ✦

Residual stress and mechanical properties of boron-doped p+-silicon films

✍ Scribed by Xiaoyi Ding; Wen H. Ko; Joseph M. Mansour

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 662 KB
Volume: 23
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(90)87048-n

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Residual stress and mechanical propertie

Residual stress and mechanical properties of polyimide thin films

✍ Wonbong Jang; Jongchul Seo; Choonkeun Lee; Sang-Hyon Paek; Haksoo Han 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 470 KB 👁 1 views

Thermophysical properties of low-residua

Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films

✍ Carlos H. Mastrangelo; Yu-Chong Tai; Richard S. Muller 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 557 KB

Residual Stress Dependent Optical Proper

Residual Stress Dependent Optical Properties of ZnI2 Films

✍ Tyagi, P. ;Vedeshwar, A.G. 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 251 KB 👁 1 views

Alternative doping of p-type amorphous s

Alternative doping of p-type amorphous silicon films using boron trifluoride

✍ J.J. Gandía; M.T. Gutiérrez; J. Cárabe 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 455 KB

Piezoresistance of boron-doped PECVD and

Piezoresistance of boron-doped PECVD and LPCVD polycrystalline silicon films

✍ M. Le Berre; M. Lemiti; D. Barbier; P. Pinard; J. Cali; E. Bustarret; J. Sicart; 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 358 KB

An investigation into the structural, electrical and piezoresistive properties of \(\mathrm{SOI}\) (silicon-on-insulator) type structures is reported. The aim of our work is to evaluate how deposition and annealing conditions may change these properties. Various characterization experiments have bee

Structure and mechanical properties of n

Structure and mechanical properties of nanocrystalline boron nitride thin films

✍ Paolo M. Ossi; Antonio Miotello 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 94 KB 👁 1 views