✦ LIBER ✦
Residual defects in Cz-silicon after low dose self-implantation and annealing from 400°C to 800°C
✍ Scribed by D.C. Schmidt; B.G. Svensson; S. Godey; E. Ntsoenzok; J.F. Barbot; C. Blanchard
- Book ID
- 114170557
- Publisher
- Elsevier Science
- Year
- 1999
- Tongue
- English
- Weight
- 142 KB
- Volume
- 147
- Category
- Article
- ISSN
- 0168-583X
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