✦ LIBER ✦
Research on Material Removal Rate of CMP 6H-SiC Crystal Substrate (0001) Si Surface Based on Abrasive Alumina (Al2O3)
✍ Scribed by SU Jianxiu; DU Jiaxi; LIU Haina; Liu Xinglong
- Book ID
- 119355416
- Publisher
- Elsevier
- Year
- 2011
- Tongue
- English
- Weight
- 293 KB
- Volume
- 24
- Category
- Article
- ISSN
- 1877-7058
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