Research on ion implantation effect on SIMOX material modification technique by X-ray photoelectron spectroscopy

✍ Scribed by E.X. Zhanga; Zh.X. Zhang; J. Chen; Zh.R. Song; H. Yang; W. He; H. Tian; X. Wang

• Book ID: 108223893
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 270 KB
• Volume: 257
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2007.01.259