Influence of microwave plasma parameters
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Enrique Camps; Stephen Muhl; Saúl Romero
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Article
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1998
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Elsevier Science
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English
⚖ 298 KB
A microwave (f = v/2p = 2.45 GHz) electron cyclotron resonance (ECR) plasma source was employed to carry out the nitriding of T-304 stainless steel at low pressures (½10 -4 torr.) with samples at the plasma floating potential. Even for nitriding times as short as 40 min the surface hardness was foun