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Representation of ion implantation distributions in two and three dimensions

✍ Scribed by Ashworth, D G; Bowyer, M D J; Oven, R

Book ID: 121479557
Publisher: Institute of Physics
Year: 1991
Tongue: English
Weight: 320 KB
Volume: 24
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/24/7/015

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