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Replication technology for optical microsystems

✍ Scribed by Michael T. Gale; Christiane Gimkiewicz; Samuel Obi; Marc Schnieper; Jürgen Söchtig; Hans Thiele; Susanne Westenhöfer


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
666 KB
Volume
43
Category
Article
ISSN
0143-8166

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