✦ LIBER ✦
Replication of micro optical element with continuous relief profile in fused silica using UV-embossing and Reactive Ion Etching
✍ Scribed by P. Jin; N. Liu; T.T. Liu; J.B. Tan
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 673 KB
- Volume
- 87
- Category
- Article
- ISSN
- 0167-9317
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