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Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing

✍ Scribed by G. Tosello; H.N. Hansen; F. Marinello; S. Gasparin


Publisher
International Academy for Production Engineering
Year
2010
Tongue
English
Weight
857 KB
Volume
59
Category
Article
ISSN
0007-8506

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