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Replacing diamond cutting tools with CBN for efficient nanometric cutting of silicon

✍ Scribed by Saurav Goel; Xichun Luo; Robert L. Reuben; Waleed Bin Rashid

Book ID: 113795250
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 519 KB
Volume: 68
Category: Article
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2011.11.028

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