✦ LIBER ✦
Repairing amplitude defects in multilayer-coated extreme-ultraviolet lithography reticles by use of a focused ion beam
✍ Scribed by Barty, Anton ;Hau-Riege, Stefan ;Stearns, Dan ;Clift, Miles ;Mirkarimi, Paul ;Gullikson, Eric ;Chapman, Henry ;Sweeney, Don
- Book ID
- 115351814
- Publisher
- The Optical Society
- Year
- 2004
- Tongue
- English
- Weight
- 899 KB
- Volume
- 43
- Category
- Article
- ISSN
- 1559-128X
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