Removal of threading dislocations from patterned heteroepitaxial semiconductors by glide to sidewalls

✍ Scribed by X. G. Zhang; P. Li; G. Zhao; D. W. Parent; F. C. Jain; J. E. Ayers

• Book ID: 107457687
• Publisher: Springer US
• Year: 1998
• Tongue: English
• Weight: 105 KB
• Volume: 27
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/s11664-998-0078-3