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Removal of SO2from Gas Streams by Oxidation using Plasma-Generated Hydroxyl Radicals

✍ Scribed by Mindong Bai; Zhitao Zhang; Mindi Bai; Chengwu Yi; Xiyao Bai


Publisher
Springer
Year
2006
Tongue
English
Weight
183 KB
Volume
26
Category
Article
ISSN
0272-4324

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Native oxide removal from SiGe using mix
✍ Bo Xie; Gerardo MontaΓ±o-Miranda; Casey C. Finstad; Anthony J. Muscat πŸ“‚ Article πŸ“… 2005 πŸ› Elsevier Science 🌐 English βš– 282 KB

HF and water delivered using liquid, gas, and supercritical CO 2 phases were used to remove native oxides and suboxides from SiGe surfaces containing 15-30% Ge. X-ray photoelectron spectroscopy was used to monitor the Si 2p and Ge 2p 3/2 peaks as a function of the process type, HF concentration, and