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Removal of oxide films from silicon surfaces in a high vacuum system: an in situ ellipsometric study

✍ Scribed by M.A. Hopper; R.A. Clarke; L. Young


Book ID
118981726
Publisher
Elsevier Science
Year
1976
Tongue
English
Weight
734 KB
Volume
56
Category
Article
ISSN
0039-6028

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