✦ LIBER ✦
Removal of native oxide from silicon surfaces of a-SiNx/Si devices using high pressure hydrogen plasma
✍ Scribed by Achyut Kumar Dutta
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 259 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0038-1101
No coin nor oath required. For personal study only.