✦ LIBER ✦
Removal of hydrogen from 1 × 1 dihydride passivated Si(100) by low-energy rare gas ions: implications for RPCVD
✍ Scribed by Mark R. Tesauro; Sanjay Banerjee; Alan Campion
- Book ID
- 116066840
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 410 KB
- Volume
- 318
- Category
- Article
- ISSN
- 0039-6028
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