Removal of a protective coating on Al by ion etching for high reflectance in the far ultraviolet

✍ Scribed by Larruquert, Juan I. ;Keski-Kuha, Ritva A. M.

• Book ID: 115353954
• Publisher: The Optical Society
• Year: 2008
• Tongue: English
• Weight: 752 KB
• Volume: 47
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.47.005253