Removal and deposition efficiencies of the long-lived 222Rn daughters during etching of germanium surfaces

✍ Scribed by G. Zuzel; M. Wójcik; B. Majorovits; M.O. Lampert; P. Wendling

• Book ID: 113822365
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 179 KB
• Volume: 676
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2011.12.020