Remote quantitative temperature and thickness measurements of plasma-deposited titanium nitride thin coatings on steel using a laser interferometric thermoreflectance optical thermometer

✍ Scribed by Liu, Yue; Mandelis, Andreas; Choy, Mervyn; Wang, Chinhua; Segal, Lee

• Book ID: 120333092
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 641 KB
• Volume: 76
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.2001673